Micro electromechanical systems Microtechnology



an etched silicon wafer


the term mems, micro electro mechanical systems, coined in 1980s describe new, sophisticated mechanical systems on chip, such micro electric motors, resonators, gears, , on. today, term mems in practice used refer microscopic device mechanical function, can fabricated in batch process (for example, array of microscopic gears fabricated on microchip considered mems device tiny laser-machined stent or watch component not). in europe, term mst micro system technology preferred, , in japan mems referred micromachines . distinctions in these terms relatively minor , used interchangeably.


though mems processes classified number of categories – such surface machining, bulk machining, liga, , efab – there indeed thousands of different mems processes. produce simple geometries, while others offer more complex 3-d geometries , more versatility. company making accelerometers airbags need different design , process produce accelerometer inertial navigation. changing accelerometer inertial device such gyroscope requires greater change in design , process, , different fabrication facility , engineering team.


mems technology has generated tremendous amount of excitement, due vast range of important applications mems can offer unattainable performance , reliability standards. in age must smaller, faster, , cheaper, mems offers compelling solution. mems have had profound impact on applications such automotive sensors , inkjet printers. emerging mems industry multibillion-dollar market. expected grow rapidly , become 1 of major industries of 21st century. cahners in-stat group has projected sales of mems reach $12b 2005. european nexus group projects larger revenues, using more inclusive definition of mems.


microtechnology constructed using photolithography. lightwaves focused through mask onto surface. solidify chemical film. soft, unexposed parts of film washed away. acid etches away material not protected.


microtechnology s famous success integrated circuit. has been used construct micromachinery.







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